Physics Lab Equipment

LEOI-44 Experimental Ellipsometer

LEOI-44 Experimental Ellipsometer

Features

  • Ideal for demonstration

  • Polarization by reflection

  • Refractive index measurement







Introduction

This is a manually operated experimental demonstrator of ellipsometry. An input beam of random polarization is first transferred to a linearly polarized beam by passing through a polarizer, and is then transferred to an elliptically polarized beam by using a quarter-wave plate. As the beam is further incident on a sample film, the polarization status of the beam reflected from the film will be altered. Optical parameters such as the thickness and refractive index of the sample film can be calculated by analysis of the change in polarization. Through this system, students can gain a better understanding of the working principle of an ellipsometer and familiarize with the operation of the instrument.


Specifications

DescriptionSpecifications
Thickness Measurement Range1 nm ~ 300 nm
Range of Incident Angle30º ~ 90º , Error ≤ 0.1º
Polarizer & Analyzer Intersection Angle0º ~ 180º
Disk Angular Scale2º per scale
Min. Reading of Vernier0.05º
Optical Center Height152 mm
Work Stage DiameterΦ 50 mm
Overall Dimensions730x230x290 mm
WeightApproximately 20 kg


Part List

DescriptionQty
Ellipsometer Unit1
He-Ne Laser1
Photoelectric Amplifier1
Photo Cell1
Silica Film on Silicon Substrate1
Analysis Software CD1
Instruction Manual1


LEOI-44 Experimental Ellipsometer-1.jpg

1. He-Ne laser

2. Polarizer

3. λ/4 wave plate

4. Incident tube

5. Sample stage

6. Output tube

7. Analyzer  

8. Photocell


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